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RF Power
Solution
Semiconductor &
Display Market
Semiconductor &
Display Market
PECVD, PEALD, Etching system
RF Generator & RF Matcher Network.
(2MHz, 13.56MHz, 27.12MHz, 1kw ~ 5kw)
RF Filter, RF Switching Module
Termination Matching Module, RF Accessories.
Military and High
Frequency AMP.
Military Biz, Ion
Accelerator Biz, Laser Biz
ELID Power Supply & Laser Maker (27.12Mhz/40.68MHz)
VHF, KU-Band Amplifiers.
RF Solid State Amplifier for Ion Accelerator (80Mhz ~ 3GHz, 7Kw)
Industrial Market
LED Etcher, PECVD,
Atmospheric Plasma,
Plasma Application.
RF Generator & RF Matching Network. (2MHz, 13.56MHz, 27.12MHz, 1kw ~ 5kw)
RF Accessories : RF Blocking filter, etc.