Products
RF Filter & Accessary
High Performance & Improving the process with RF Filter & Accessary
For Semiconductor Equipment requires Smart & High performance RF Accessories, RF Blocking Filter, RF Sensor, RF Module to Achieve Efficiently Controlling manufacturing Process and high reliability for all your application.. Necessary for Customized, Minimized, and becoming Customer-Focused technology... RFPT’s product expertise and experience give the best solution of RF application and any trouble of RF noise, unstable condition in your System.
Customized Product RF Filter
RFPT takes “Total RF solution” for customer needs and technical support at any customer systems.
All RF filters are designed based upon RF simulation and technical experience.
RFPT’s RF Filter offers the latest RF power semiconductor technology and outstanding operating features making them leading edge products.
To protect the RF Filter circuit, a temperature sensor called safety eye was applied. Which is used in various ways, such as deposition, etcher, cleaning, Asher, Atmospheric pressure, and Sputter systems.
#1Zone ~ N Zone RF Filter
#TC, TCS RF Filter
#High Power RF Filter
Features
Blocking for RF energy leakage
RF high impedance technology
Multi-frequency technology
High power handling technology : RF 30KW/AC 5KW
2-Zone for PEALD, PECVD
128 Multi-Zone for Etcher
Applications
Descum System
PECVD System
PEALD System
Dry Etch System
Coating, Sputtering System
OLED system
Atmospheric Plasma System
Application | Customer | Zone | Spec | Record |
---|---|---|---|---|
PECVD | 1 Zone | 13.56MHz Zout > 1kΩ | 4,000 sets | |
Wonik IPS | 2 Zone | 27.12MHz Zout > 2kΩ | 1,000 sets | |
6 Zone | 13.56MHz Zout > 1kΩ | 10 sets | ||
ASMK & ASMJ | 2 Zone | 27.12MHz Zout > 1kΩ | 200 sets | |
TEL Korea | 2 Zone | 27.12MHz Zout > 3kΩ | 5 sets | |
Dry Etcher | 34 Zone | 20 sets | ||
SEMES | 5 Zone | 13.56 /2 /60MHz Zout > 1kΩ | 15 sets | |
4 Zone | 10 sets | |||
APTC | 18 Zone | 13.56MHz Zout > 1kΩ | 100 sets |
RF VIZ Sensor
RF VIZ is a high performance RF vector sensor providing high accurate measurements of RF and Plasma physical parameters in real-time based on specific DSP & FPGA technology. Provides the optimized RF key information for various & specific RF plasma applications with RFPT own specific calibration approaches. Provides easy installation to customer systems with various physical shapes like All-in-One, Stand-alone & Built-in. Provides RF information for various frequencies – MF, HF & VHF Next generation will be a very high performance sensor enable to read pulsed RF, sweeping frequency & arbitrary waveforms for advanced plasma applications.
#450KHz LF VIZ SENSOR
#13.56MHz RF VIZ SENSOR
#27.12MHz RF VIZ SENSOR
High Speed ADC
Windowing
IQ Demodulation
Fast Fourier Transform
Linear Algebra Calculation
High performance FPGA
System on Chip w/ MicroBlaze
Dry Etch & PECVD @ Large Area FPD or OLED
Metal CVD, PECVD, ALD & Dry Etch
Pre-Match–Power Sensor for monitoring
Pro-Match–Dual Plasma Source System ICP Etch w / CCP bias
Process required “Tool to Tool Matching”and stable RF monitoring
Switchable RF Matcher for LF Generator
Specifications
Input connector : N-type(female, right-angle)
Output connector : N-type(female, right-angle)
Cooling : Forced Airr
Temperature : 5℃ to +40℃
Intertace : Analog Interface(15-pin, Male)
Max Input Power : 900w
Selectable Real Impedance : 7 Positions
Selectable Real Impedance : 4 Positions
Nput DC Voltage : DC 24v
Max Input DC Current : Max 2A
no
Tap Selected Impedance Matching
Low Frequency Application(400kHz)
Real and Imaginary Impedance Matching
Customizing Available