RF Filter & Accessary

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RF Filter & Accessary

RF Filter & Accessary

RF Filter & Accessary

필수가 되고 있는 RF Filter & Accessary

소형화, 집적화, 세밀화되고 있는 메모리 칩을 생산하기 위해서는 제조 공정 변수를 보다 효율적으로 조절이 가능한 반도체 제조 장비가 절대적으로 필요로 하며, 이 장비는 Plasma chamber에서의 RF Power가 다른 주변 기기로 유입되거나 영향을 주는 것을 차단하거나 억제하는데 RF Filter가 필수적이며, 장비 운용 시 부수적으로 실용성이 높은 accessary등의 역할이 중요해지고 있다.

  • RF Filter
  • ESC RF Blocking Filter
  • RF Blocking Filter
  • RF Switching Module
  • VI Sensor
  • RF Driver

RF Filter

1-zone Type

  • Frequency 370 kHz 13.56 MHz 27.12 MHz
    Insertion Loss Max -20 dB Max -30 dB Max -30 dB
    AC Current 20 A / 30 A
    Connector Output: Multi-contact 2pin  /  Input: 3Pin Terminal Block
    Feature -

1-zone Type - Prime

  • Frequency 370 kHz 13.56 MHz 27.12 MHz
    Insertion Loss Max -25 dB Max -30 dB Max -30 dB
    AC Current 20 A / 30 A
    Connector Output: Multi-contact 2pin  /  Input: 3Pin Terminal Block
    Feature High Impedance, Temperature Monitoring

2-zone Type

  • Frequency 370 kHz 13.56 MHz 27.12 MHz
    Insertion Loss Max -25 dB Max -30 dB Max -30 dB
    AC Current 20 A / 30 A
    Connector Output: Multi-contact 2pin  /  Input: 3Pin Terminal Block
    Feature Dual Body

2-zone Type - Prime

  • Frequency 370 kHz 13.56 MHz 27.12 MHz
    Insertion Loss Max -25 dB Max -30 dB Max -30 dB
    AC Current 20 A / 30 A
    Connector Output: Multi-contact 2pin  /  Input: 3Pin Terminal Block
    Feature High Impedance, Temperature Monitoring

Multi-zone Type

  • Frequency 370 kHz 13.56 MHz 27.12 MHz
    Insertion Loss Max -20 dB Max -30 dB Max -30 dB
    AC Current 10 A / 20 A / 30 A
    Connector Output: Harting connector (N-Pin) / Input: Terminal Block (N-Pin)
    Feature 4 ~ N Channels

ESC Type

  • Frequency 370 kHz 13.56 MHz 27.12 MHz
    Insertion Loss Max -20 dB Max -30 dB Max -30 dB
    AC Current 20 A / 30 A
    Connector Output: BNC connector / Input: BNC Terminal Block
    Feature -

DC Type

  • Frequency 370 kHz 13.56 MHz 27.12 MHz
    Insertion Loss Max -20 dB Max -30 dB Max -30 dB
    AC Current 20 A / 30 A
    Connector Output: BNC connector / Input: BNC Terminal Block
    Feature -

※ Any Frequency and Power level are available

RF Switch

  • Frequency 13.56 MHz 27.12 MHz
    Power Max 2000w
    Insertion Loss Max 0.3dB
    VSWR Max 1.2
    Connector Output: Harting connector / Input: N-Pin Terminal Block

RF Sensor

  • Frequency 370 kHz 13.56 MHz 27.12 MHz
    Insertion Loss Max -20 dB Max -30 dB Max -30 dB
    AC Current 20 A / 30 A
    Connector Output: Harting connector / Input: N-Pin Terminal Block
    Feature High Impedance, Temperature Monitoring

RF Driver

  • Frequency 20 ~ 150 MHz
    Power 2 ~ 500 W
    Feature -

Products Matrix of RF Driver

500w
300w
150w
80w
30w
200w
4w
Walt/Hz 20MHz 27.12MHz 40MHz 40.68MHz 50MHz 68MHz 80MHz 150MHz

※ Any Frequency and Power level are available

그누보드5

Address

dongilTechnoTown C-3407, 889-1, Gwanyang-dong,
Dongan-gu, Anyang-City, Gyeonggi-do, Korea
TEL: +82-31-422-0973
FAX: +82-31-422-0975
E-mail: dhlee@rfpowertech.co.kr
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