Matching Unit

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Matching Unit

Matching Unit

Matching Unit

Global provider of RF power solutions.
Serving the RF Generator and Matching unit for plasma applications

Smart Digital Matching Unit DX-Series

The new line of DX-Series Digital controlled Automatic Matching Unit is designed to match the 50 Ohm impedance of the RF Power Supply to the complex load impedance of a Plasma Load. The new line of DX-XXX series are able to operate with any kind of RF power with special designed Control program. We also offer customer tailored modifications of customer Matching Unit to other load impedances, specifications, RF frequencies or to upgrade them.

13.56MHz Matching Units (AX-Series)

  • RF Power 300 W 600 W 1000 W
    Reflected Power 30W 60W 100W
    RF Connector N-Type
    Interface AnalogUser port, RS-232C
    Dimensions 241(W)×303(L)×131(H) 241(W)×480(L)×131(H) 465(W)×500(L)×132(H)

13.56MHz Matching Units (DX-Series)

  • RF Power 1500 W 3000 W 6000 W
    Reflected Power 150W 300W 600W
    RF Connector HN-Type HN-Type DIN-Type
    Interface AnalogUser port, RS-232C
    Dimensions 485(W)×520(L)×131(H) 485(W)×520(L)×131(H) Customizing

2MHz Matching Units (DX-Series)

  • RF Power 1500 W 3000 W 6000 W
    Reflected Power 150W 300W 600W
    RF Connector HN-Type HN-Type DIN-Type
    Interface AnalogUser port, RS-232C
    Dimensions 485(W)×520(L)×131(H) 485(W)×520(L)×131(H) Customizing

27.12MHz Matching Units (DX-Series)

  • RF Power 300 W 600 W 1000 W
    Reflected Power 30W 60W 100W
    RF Connector N-Type
    Interface AnalogUser port, RS-232C
    Dimensions 241(W)×303(L)×131(H) 241(W)×480(L)×131(H) 465(W)×500(L)×132(H)

Customizing RF Generators and NEW ITEMS

  • EDM
    (Electronically Digital Matching Unit)
  • Dual Matcher
  • Switchable Matcher
  • Termination Matcher

※ Any Frequency and Power level are available

Products Matrix

6kw
5kw
3kw
1.5kw
1kw
600w
300w
Walt/Hz 2MHz 13.56MHz 27.12MHz
그누보드5

Address

dongilTechnoTown C-3407, 889-1, Gwanyang-dong,
Dongan-gu, Anyang-City, Gyeonggi-do, Korea
TEL: +82-31-422-0973
FAX: +82-31-422-0975
E-mail: dhlee@rfpowertech.co.kr
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