RF Generator

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RF Generator

RF Generator

RF Generator

Global provider of RF power solutions.
Serving the RF Generator and Matching unit for plasma applications

Features

  • Ultra Strong Ruggedness with wideband LDMOS technology
  • Power Mode (Forward / Delivered)
  • DSP control technology
  • Stable output power (Balanced Amplifier)
  • CEX / Phase shifter (Option)
  • Frequency and Pulse modulation
  • Competitive price and easy to use

Applications

  • Descum system
  • PECVD system
  • PEALD system
  • Dry Etch system
  • Coating, Sputtering system,
  • OLED system
  • Atmospheric plasma system
  • Medical

13.56MHz RF Generators (REX-Series)

  • RF Power 300 W 600 W 1000 W
    Reflected Power 30 W 60 W 100 W
    RF Connector N-Type
    Interface Analog User port, RS-232C
    Dimensions 241(W)×303(L)×131(H) 241(W)×480(L)×131(H) 465(W)×500(L)×132(H)

13.56MHz RF Generators (REXi-Series)

  • RF Power 1000 W 3000W 6000 W
    Reflected Power 150 W 300 W 600 W
    RF Connector HN-Type HN-Type DIN-Type
    Interface Analog User port, RS-232C
    Dimensions 485(W)×520(L)×131(H) 485(W)×520(L)×131(H) Customizing

2MHz RF Generators (REXi-Series)

  • RF Power 1000 W 3000 W 5000 W
    Reflected Power 100 W 300 W 500 W
    RF Connector N-Type HN-Type DIN-Type
    Interface Analog User port, RS-232C
    Dimensions 485(W)×520(L)×131(H) 485(W)×520(L)×131(H) Customizing
    Cooling Air Water Cooling Water Cooling

27.12MHz RF Generators (REXi-Series)

  • RF Power 1000 W 3000 W 5000 W
    Reflected Power 100 W 300 W 500 W
    RF Connector N-Type HN-Type DIN-Type
    Interface Analog User port, RS-232C
    Dimensions 485(W)×520(L)×131(H) 485(W)×520(L)×131(H) Customizing
    Cooling Air Water Cooling Water Cooling

400kHz RF Generators (REXi-Series)

  • RF Power 400 W
    Reflected Power 40 W
    RF Connector N-Type
    Interface Analog User port, RS-232C
    Dimensions 483(W)×431(L)×88(H)
    Cooling Air

Customizing RF Generators and NEW ITEMS

  • Dual Generator
  • Portable RF
    Generator
  • Hybrid Generator &
    Microwave Generator
  • RF Generator
    for Medical

※ Any Frequency and Power level are available

Products Matrix

6kw
5kw
3kw
1.5kw
1kw
600w
400w
300w
200w
Walt/Hz 400kHz 2MHz 13.56MHz 27.12MHz
그누보드5

Address

dongilTechnoTown C-3407, 889-1, Gwanyang-dong,
Dongan-gu, Anyang-City, Gyeonggi-do, Korea
TEL: +82-31-422-0973
FAX: +82-31-422-0975
E-mail: dhlee@rfpowertech.co.kr
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